Cryogenic gas purification for excimer lasers
Oxford Lasers' GP series gas purifiers are essential to maintain
constant optimum laser performance in most excimer laser systems.
Laser performance in today's industrial and scientific environment
must achieve higher and higher standards of beam quality and power
stability. This is particularly true in the case of lasers operating
at 193 and 157 nm and those with line-narrowed output.
Even in the latest commercial excimer lasers, the reactions of
the highly reactive halogen component produces molecular species
in the gas mixture which progressively degrade beam quality and
output power by blocking the effectiveness of the pre-ionizing
radiation.
The Oxford Lasers GP series of gas purifiers cleanse excimer
gas mixtures in an on-line, continuous mode. The removal of volatile
impurities in the gas mixture improves gas lifetime, window cleaning
interval, beam uniformity, pulse to pulse stability, timing jitter
and reliability. All these factors combine to lengthen the maintenance
interval and reduce operating costs.
GP systems are available for ArF, F2, KrF and XeCl gas mixtures.
A suitable model for your application can be identified in the
range of gas purifiers listed opposite. Please contact
us if you need further information.
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GP1000 (ArF and F2 lasers)
The GP1000 is the entry-level gas purifier for ArF and F2 lasers
only. Using liquid nitrogen as the cooling medium and manual gas
controls for simplicity it represents an affordable system for
today's R&D environment. Please contact
us if you need further information.
Applications: Short wavelength R&D
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GP2000X Liquid nitrogen based purifiers (all excimer lasers)
The GP2000X series is the world renowned, tried and trusted liquid
nitrogen based gas purifier, for use with all types of excimer
laser. Suitable for excimer lasers installed as part of small-scale
production lines or for R&D applications. The GP2000X provides
the full benefit of cryogenic purification together with flexibility
of operation for all excimer laser gas mixtures, with proven ruggedness
and safety. Please contact
us if you need further information.
Applications: All excimer lasers in R&D, Small scale production.
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GP3000 Industrial excimer laser gas processor
The GP3000 offers a complete solution to any excimer
gas purification requirement. Utilizing a built-in, closed cycle
cooler to provide the cooling medium, it provides hands free,
long term unattended running for industrial applications in demanding
environments where liquid nitrogen is unavailable. Please contact
us if you need further information.
Applications: All excimer lasers, Demanding and industrial environments
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